“Walking the Feynman’s Talk” – Using Focused Electron Beam for Direct-Write Nanofabrication of CNT, Graphene and Graphene Oxide Electronic Devices.

ABSTRACT: In this presentation, I will introduce a unique “direct-write” nanoscale patterning technology – Focused Electron Beam Induced Processing (FEBIP) – in the context of achieving an ever greater control of the material composition and component shape in 3D in order to advance critical nanoelectronics applications of emerging 2D materials. A brief overview of the FEBIP process fundamentals will be provided to highlight a range of technology capabilities, as well as recently discovered new avenues for further exploration with high potential impact on additive nanomanufacturing. The main focus of the talk will be on the FEBIP application to managing interfaces in the emerging field of carbon (CNT/graphene/graphene oxide)-based nanoelectronic devices. I will particularly exemplify the power of FEBIP using the results we obtained over the last 5 years, including (1) demonstration of the record-low resistance Ohmic graphitic nanojoints to the multi-walled carbon nanotube interconnects (MWCNTs), (2) thermomechanically-robust, high electric performance composite graphene-graphitic carbon-metal interface compatible with conventional CMOS fabrication workflows, (3) high resolution graphene etching/patterning for band-gap engineering, and (4) graphene doping and selective reduction of graphene oxide precursors using FEBIP carbon, resulting in dynamically evolving p-n junctions. If time permits, I will conclude with a brief introduction how FEBIP can be used in combination of Metal-assisted Chemical Etching (MaCE) to produce topologically-complex, 3D structures from composite metal-semiconductor materials, which could have utility in a wide array of applications, from optoelectronics to chemical sensing to solar cells.

SPEAKER’S BIOGRAPHY: Andrei G. Fedorov (Purdue ME PhD’97 under advisement of Prof. Viskanta) is the Woodruff Professor in the School of Mechanical Engineering and the Petit Institute for Bioengineering and Biosciences at Georgia Tech. He has been on faculty at Georgia Tech since 2000, and his current research focuses on MEMS-enabled bioanalytical instrumentation, electron-beam-mediated nanomanufacturing, thermal management of high performance electronics, and portable/distributed power generation with synergetic CO₂ capture.

    Dr. Fedorov’s research has been recognized by peers, including the 2006 Branimir F. von Turkovich Outstanding Young Manufacturing Engineer Award from the Society of Manufacturing Engineers (SME) “for contributions and accomplishments in the manufacturing industry”and the 2007 Bergles-Rohsenow Award in Heat Transfer from the American Society of Mechanical Engineers (ASME) for “sustained contribution to heat, mass, and radiation transfer.” Most recently, Dr. Fedorov has been selected to become a recipient of the 2010 Gustus L. Larson Memorial Award, given jointly by Pi Tau Sigma (International Mechanical Engineering Honor Society) and the ASME, in recognition of outstanding achievements in mechanical engineering within ten to twenty years following graduation. Dr. Fedorov authored/co-authored over 200 archival articles in premier technical journals and refereed conference proceedings, along with numerous invited and keynote presentations at major national and international conferences. He is a member of International Advisory Board of the Tokyo Tech’s Global Center of Excellence for Energy Science; serves on Editorial Advisory Boards of the International Journal of Multiscale Computational Engineering, International Journal of Interfacial Phenomena and Heat Transfer, the Journal of Nanoelectronics and Optoelectronics, and Transactions of the Japanese Society of Mechanical Engineers (JSME); and consults a number of government agencies and major corporations worldwide.   

    Dr. Fedorov's research has led to development of new technologies for various applications, resulting in 27 issued US patents and numerous pending applications. For his inventions of biomedical devices, the World Technology Network (WTN), in cooperation with AAAS Science Magazine, CNN and leading technology companies, selected Dr. Fedorov as a WTN Associate and one of the twenty five “most innovative people and organizations in the science and technology world” nominated for the 2005 World Technology Award in Health and Medicine. Dr. Fedorov was an invited participant in the 2006 National Academy of Engineering (NAE) Frontiers of Engineering Symposium, gathering "the nation's top 100 engineers between the ages of 30-45 from academy, industry and national labs." Dr. Fedorov was recognized with the US National Aeronautics and Space Administration (NASA) Invention & Contribution Board Award for development of catalytic reactor technologies, as well as multiple inventor recognition awards from the Semiconductor Research Corporation (SRC) and Microelectronics Advanced Research Corporation (MARCO). With his students he has started two technology companies, in the space of gene/drug delivery microarrays and thermal management for laser medicine, to commercialize his inventions. He serves on the Board of Directors of Horizon Theatre Company ( http://www.horizontheatre.com/ ), a leading contemporary theater in Southeast of the United States.