Facilities

Appenzeller NanoLab

The NanoLab adds three components that complement the equipment capabilities available at the Birck Nanotechnology Center Facilities – electron beam lithography, electrical characterization, and magnetism measurement.

 

Raith e_Line Electron Beam Lithography System
• Minimum line width < 20nm • Stitching accuracy of 40nm • Overlay accuracy of 40nm • Sample size capacity up to 4" wafers • Thermal assisted field emission gun • 10 MHz DSP-controlled digital pattern generator • Cross-over free column with highest beam current at 2nm spot size • Laser interferometer stage with 100mm x 100mm travel range and 2nm    resolution achieved by closed-loop piezo-positioning • Training manual [pdf]
Lake Shore Electromagnet-Based Horizonal Field Cryogenic Probe Station
• Model: EMPHX-HF • 5.5kOe (0.55T) horizontal (in-plane) field electromagnet • 360° sample stage rotation option • High stabilility operation from 3.2K to 400K • Accommodates up to 25mm (1in) diameter wafers • Four thermally anchored micro-manipulated probe arms • Probe arms with 3-axis adjustments and ±5° theta planarization • Cables, shields, and guards minimize electrical noise and thermal losses • Data Sheet [pdf]
Lake Shore 4-Inch Wafer Cryogenic Probe Station
• Model: FWPX • High stability operation from 3.5K to 475K • Accommodates up to 102mm (4in) diameter wafers • Six thermally anchored micro-manipulated probe arms • Probe arms with 3-axis adjustments and ±5° theta planarization • Sample stage with in-plane translation and ±5° in-plane rotation • High vacuum to 10^-6 torr • Cables, shields, and guards minimize electrical noise and thermal losses • Data Sheet [pdf]
Lake Shore Superconducting Magnet-Based Vertical Field Cryogenic Probe Station
• Model: CPX-VF • 25kOe (2.5T) vertical field superconducting magnet • High stability operation from 2K to 400K • Sample can be maintained at room temp while system cools. • S • Accommodates up to 51mm (2in) diameter wafers • Four thermally anchored micro-manipulated probe arms • Probe arms with 3-axis adjustments and ±5° theta planarization • Sample stage with in-plane translation and ±5° in-plane rotation • High vacuum to 10^-7 torr • Cables, shields, and guards minimize electrical noise and thermal losses • Data Sheet [pdf]
Agilent 4155C Semiconductor Parameter Analyzer (2)
• Triaxial-guarding • 4xMedium Power SMUs (MPSMUs) with 10fA/2μV resolution • 2xVoltage Monitor Units (VMUs) with 0.2μV res. in differential mode • 2xVoltage Source Units (VSUs) • Interfaced with Desktops equipped with LabVIEW • Data Sheet [pdf] • User's guide [pdf]
Andeen-Hagerling (AH 2700A) Ultra-Precision Capacitance Bridge
• Alto Farad (aF) resolution • Frequencies from 50Hz - 20kHz • Interfaced with Desktops equipped with LabVIEW • Data Sheet [pdf]
Quantum Design DynaCool Physical Property Measurement System (PPMS) Cryostat
• General field/temperature platform: Temperature: 1.8 – 400 K Magnetic field: +/- 9 tesla (90 kOe) 25mm diameter sample space • Hosts wide variety of automated measurements... • Electrical transport: magnetoresistance, Hall effect, I-V curves; external gating possible Micro-ohm up to 5 giga-ohm • Magnetometry: DC magnetic moment using VSM 10-6 emu up to 100 emu • Custom probes, external electronics Other measurements can be added: • Torque magnetometry • Heat Capacity • Dilatometry • Fiber optic for photoconductivity • Dielectric constant • 20 GHz for FMR, NMR • 50 mK Dilution Refrigerator • Training manual [link]
Quantum Design Magnetic Property Measurement System (MPMS-3) SQUID Magnetometer
• Most sensitive instrument for measuring bulk magnetic dipole moment m • Inductive measurement using gradiometer coils around a moving sample • High speed: full magnetic m(H) hysteresis loops in just minutes • Uses a “SQUID” : superconducting interferometer • Samples: film, bulk, crystals, powder • 8mm diameter sample space (4x4mm film typical) • 10 -8 emu (10 -11 A-m2) sensitivity • Temp. : 1.8 – 400 K, oven : 300 – 1000 K • Field : +/- 7 tesla (70 kOe) • AC susceptibility: f = 0.1 – 1000 Hz • electrical transport or biasing while measuring m • EverCool: pulse-tube cryocooler recondenses the helium that evaporates from the dewar Other measurements can be added: • Fiber optic for sample illumination • Sample rotation • Training manual [link]