Small Indiana Business Rates

SERVICE CHARGES:

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Cleanroom Daily Access Fee

8 Days Monthly

Per Day

$70.00

Training Time

No

Per Hour

$98.00

Engineering Staff Time

No

Per Hour

$125.00

Process Scientist Staff Time

No

Per Hour

$131.00

EQUIPMENT: Metallization

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Airco E-Beam Evaporator

No

Per 4 Hour Use

$313.00

Cha E-Beam Evaporator

No

Per 4 Hour Use

$313.00

Leybold E-Beam Evaporator

No

Per 4 Hour Use

$313.00

Perkin Elmer 2400 Sputterer

No

Per 4 Hour Use

$313.00

Varian E-Beam Evaporator

No

Per 4 Hour Use

$313.00

PVD Electron Beam Evaporator #1

No

Per 2 Hour Use

$313.00

PVD Electron Beam Evaporator #2

No

Per 4 Hour Use

$313.00

Veeco Thermal Evaporator

No

Per 4 Hour Use

$313.00

Kurt J Lesker E-Beam

No

Per 3 Hour Use

$313.00

PVD Sputtering System - Metals/Dielectrics

No

Per 2 Hour Use

$187.00

PVD Sputtering System - Magnets

No

Per 2 Hour Use

$187.00

Vistec E-Beam (VB6)

No

Per Hour

$450.00

EQUIPMENT: Testing

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Veeco Dimension AFM

No

Per 1 Hour Use

$42.00

Dimension 3100 AFM

No

Per 1 Hour Use

$46.00

Alpha-Step IQ

No

Per Half-Hour Use

$14.00

Filmetrics

No

Per Half-Hour Use

$27.00

Olympus BX-60 Microscope

No

Per Half-Hour Use

$11.00

Ellipsometer

No

Per Half-Hour Use

$21.00

JEOL JCM-5000 Table Top SEM

No

Per Half-Hour Use

$47.00

MMR Probe Station #2

No

Per 2 Hour Use

$159.00

EQUIPMENT: Furnaces

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Blue M Oven

No

Per 1 Hour Use

$133.00

Ammonia (NH3) Anneal

No

Per 1 Hour Use

$44.00

Nitric Oxide Anneal

No

Per 1 Hour Use

$30.00

Silicon Carbide Anneal

No

Per 1 Hour Use

$30.00

Pyrogenic Oxydation

No

Per 4 Hour Use

$215.00

RTA Heatpulse 610

No

Per 1 Hour Use

$33.00

RTA MiniPulse

No

Per 1 Hour Use

$33.00

ProTemp Tube_01

No

Per 1 Hour Use

$91.00

ProTemp Tube_02

No

Per 1 Hour Use

$91.00

ProTemp Tube_03

No

Per 1 Hour Use

$91.00

ProTemp Tube_04

No

Per 1 Hour Use

$91.00

ProTemp Tube_05

No

Per 1 Hour Use

$91.00

ProTemp Tube_06

No

Per 1 Hour Use

$91.00

ProTemp Tube_07

No

Per 1 Hour Use

$91.00

ProTemp Tube_08

No

Per 1 Hour Use

$91.00

ProTemp Tube_09

No

Per 1 Hour Use

$91.00

EQUIPMENT: Plasma (Etch)

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Branson

No

Per 1 Hour Use

$24.00

Axic CVD

No

Per 2 Hour Use

$131.00

Plasma Tech RIE

No

Per Half-Hour Use

$36.00

ASE Etcher

No

Per 1 Hour Use

$93.00

EQUIPMENT: Photolithography

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

MJB-1 Wafer Aligner

No

Per Half-Hour Use

$22.00

MJB-2 Wafer Aligner

No

Per Half-Hour Use

$22.00

Suss MA-6 Mask Aligner

No

Per Half-Hour Use

$24.00

Spinner #1

No

Per Half-Hour Use

$11.00

Spinner #2

No

Per Half-Hour Use

$11.00

Nanonex NX-2000 Nanoimprinter

No

Per 1 Hour Use

$67.00

Suss SB6e Substrate Bonder

No

Per 1 Hour Use

$84.00

MA-24 Mask Aligner

No

Per Half-Hour Use

$33.00

EQUIPMENT: Electrical Characterization

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

MMIIIProbe 3

No

Per 2 Hour Use

$142.00

MMIIProbe 2

No

Per 2 Hour Use

$142.00

MMIProbe 1

No

Per 2 Hour Use

$142.00

Jandel 4-point probe system

No

Per Half-Hour Use

$8.00

EQUIPMENT: Photomasks

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

PG

No

Per Mask

$421.00

IR

No

Per Mask

$324.00

RET

No

Per Mask

$90.00

Transparency

No

Per Mask

$33.00

EQUIPMENT: Miscellaneous

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Xef Etcher

No

Per 1 Hour Use

$57.00

Parylene CVD

No

Per 4 Hour Use

$150.00

FiJi200 ALD

No

Per Use

$110.00

DiscoDad Dicing Saw

No

Per 1 Hour Use

$73.00

Critical Point Driver (CPD)

No

Per 1 Hour Use

$36.00

CMP

No

Per 1 Hour Use

$57.00

Disco Dad Dicing Saw #2

No

Per 1 Hour Use

$88.00

Easy Tube 3000 ALD

No

Per 2 Hour Use

$76.00

Jipelec RTA

No

Per 1 Hour Use

$48.00

Heidleburg

No

Per 2 Hour Use

$429.00

Bruker Optical Profileometer

No

Per Half-Hour Use

$24.00

EQUIPMENT: Bonders & STS

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

STS_AOE

No

Per 1 Hour Use

$93.00

STS_ASE

No

Per 1 Hour Use

$93.00

Panasonic

No

Per Hour

$281.00

Stress Machine

No

Per Half-Hour Use

$113.00

West Bond

No

Per 1 Hour Use

$165.00

Wire Bonder #1 (KNS)

No

Per 1 Hour Use

$31.00

Wire Bonder #2 (KNS)

No

Per 1 Hour Use

$31.00

JFP Wire Bonder

No

Per 1 Hour Use

$31.00

KNS4526 Ribbon Bonder

No

Per 1 Hour Use

$31.00

Small Wire Bonding Package

No

Per Package

$16.00

Large Wire Bonding Package

No

Per Package

$39.00

METALS:

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Gold

No

Per Nanometer

$1.09

Platinum

No

Per Nanometer

$2.43

Palladium

No

Per Nanometer

$0.20

Scandium

No

Per Nanometer

$4.77

All Other Metals

No

Per Nanometer

$0.15

*$13k Annual cap refers to the $13,000 per user, per account CAP on a fiscal year basis

**8 Days Monthly cap refers to a max of 8 days paid per month in access fees per user, per account

LAB ACCESS (CHARGE BASED ON HIGHEST LEVEL ENTERED)

MACHINE/PROCESS

CAP?

UNIT

RATE

DRY LAB ACCESS CHARGE - LEVEL ONE

8 days Monthly

Per Day

$22.00

SOLVENT LAB ACCESS CHARGE - LEVEL TWO

8 days Monthly

Per Day

$69.00

ACID LAB ACCESS CHARGE - LEVEL THREE

8 days Monthly

Per Day

$100.00

*Cap is per user, per project per fiscal year

BIOLOGY LABS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

BioLabs Access

8 days Monthly

Per Day

$48.00

Zetasizer

No

Per Hour

$7.00

Olympus FV1000 Confocal Microscope

No

Per Hour

$39.00

Cell Culture BioHood Surcharge

No

Per Month

$39.00

Special Projects Hourly Staff Rate

No

Per Hour

$85.00

ELECTRON MICROSCOPY EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Hitachi S-4800 Field Emission SEM (s-4800)

No

Per Hour

$48.00

Titan 80-300 kV Environmental Electron Microscope (titan_80_300)

No

Per Hour

$170.00

FEI Nova 200 NanoLab DualBeam TM-SEM/FIB (nova_200)

No

Per Hour

$107.00

SPI Sputter Coater (SPI_sputter_coater)

No

Per Run

$41.00

Electron Microscopy Staff Rate

No

Per Hour

$56.00

ATOMIC FORCE MICROSCOPY RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Nanotech AFM 1

No

Per Hour

$39.00

Nanotech AFM 2

No

Per Hour

$39.00

Agilent 5500

No

Per Hour

$39.00

Asylum MFP3D Bio AFM

No

Per Hour

$68.00

Asylum Cypher

No

Per Hour

$68.00

*Cap is per user, per project per fiscal year

EPITAXY EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Electrodeposition

No

N/C

N/A

XRD (xrd) - normal scan

No

Per Hour

$85.00

XRD (xrd) - rsm scan

No

Per Run

$510.00

OMVPE Aixtron (aixtron)

No

Per Run

$282.00

Nitride Sputter System (nitride_sputtering)

No

Per Run

$138.00

Oxide PLD System (pld)

No

Per Run

$136.00

Epitaxy Staff Rate

No

Per Hour

$82.00

OPTICS AND SPECTROSCOPY EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Spectrophotometer Lambda

No

Per Hour

$105.00

Micro-sample Spectrometer

No

Per Hour

$108.00

Raman Spectrometer T64000

No

Per Hour

$48.00

NSOM_Renishaw

No

Per Hour

$30.00

V-VASE Spectroscopic Ellipsometer

No

Per Hour

$25.00

Optics Staff Rate

No

Per Hour

$102.00

RAITH E-BEAM EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Raith E-Line E-beam (raith)

No

Per Hour

$61.00

Raith E-Beam Staff Rate

No

Per Hour

$73.00

MPCVD EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

MPCVD (MPCVD)

No

Per Use

$96.00

MPCVD Staff Rate

No

Per Hour

$82.00

SURFACE ANALYSIS AND SPM EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Kratos XPS Analysis Time (xps - staff)

No

Per Hour

$108.00

Kratos XPS Instrument Time (xps)

No

Per Hour

$96.00

Glovebox

No

Per Hour

$39.00

Omicron (omicron)

No

Per Run

$185.00

LASER DOPPLER VIBROMETRY EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Micro System Analyzer (polytec_laser_vibrometer)

No

Per Hour

$10.00

Vaccum Chamber (Suss_PLV50_ProbeStation)

No

Per Hour

$21.00

LDV Staff Rate

No

Per Hour

$56.00

*Cap is per user, per project per fiscal year

FEMTOSECOND LASER & RAMAN SPECTROSCOPY RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Femtosecond Laser

No

Per Hour

$47.00

Raman Spectrometer

No

Per Hour

$42.00

Training/Staff Time

No

Per Hour

$57.00

THERMOELECTRIC CHARACTERIZATION RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Z-Meter (z_meter)

No

Per Hour

$16.00

Bulk (TE_bulk)

No

Per Hour

$16.00

Thin Film (TE_ThinFilm)

No

Per Hour

$16.00

Training/Staff Time

No

Per Hour

$48.00

Rates current as of July 1, 2013

For more information or questions, please contact:

  • Natosha Whisler
  • Recharge Center
  • Birck Nanotechnology Center
  • Phone: (765) 494-1539
  • Email: Nwhisle@purdue.edu

Purdue University, 610 Purdue Mall, West Lafayette, IN 47907, (765) 494-4600

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