Minipulse RTA

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Minipulse RTA

General Information

iLab Name: RTP Minipulse

iLab Core: BRK Furnace Core

FIC: Shared

Owner: Dan Hosler

Location: Cleanroom R Bay

Max Wafer Size: 6 inch (150 mm)

System Information

General Description

The Minipulse RTA is a small, benchtop rapid thermal processing machine used for a wide range of experiments, thus, contamination and cleanliness is not controlled.

Capabilities

  • Capable of simple time at elevated temperature experiments for short time intervals
  • Steady state process time can be set from 1 second to a maximum of 5 minutes
  • Steady state temperature can be set from 300 to 1000°C
  • Process gas is limited to N2

Materials Compatibility

Not Applicable

Notes

Please note: Not capable of long process runs at high temperatures

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.