Return to Equipment at Birck Nanotechnology Center

General Information

iLab Name: Jipelec RTA

iLab Core: BRK Furnace Core

FIC: Shared

Owner: Dan Hosler

Location: Cleanroom R Bay

Max Wafer Size: 8 inch (200 mm)

System Information

General Description

The Jipelec RTA is a very powerful rapid thermal processing machine. The stainless steel cold wall chamber provides a very clean process environment. Small samples are placed on a 6" wafer holder. Temperature control depends upon your final steady state temperature. For temperature below 500°C, a thermocouple is used to control the temperature. For temperatures above 500C, and pyrometer is used.


Materials Compatibility

Compatibility by chamber


You must supply (and piranha clean) your own 6" silicon wafer as a sample holder for smaller samples