TEOS Deposition

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TEOS Deposition

General Information

FIC: Dallas Morisette

Owner: Dan Hosler

Location: Cleanroom R Bay

Max Wafer Size: 6 inch (150 mm)

System Information

General Description

TEOS Deposition Furnace - Low Pressure

Materials Compatibility

Check with Dan Hosler

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.