TEOS Deposition

Printable version

TEOS Deposition

General Information

FIC: Dallas Morisette

Owner: Rich Hosler

Location: Cleanroom R Bay

Max Wafer Size: 6 inch (150 mm)

System Information

General Description

TEOS Deposition Furnace - Low Pressure

Materials Compatibility

Check with Dan Hosler

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.