Protemp Horizontal Furnaces

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Protemp Horizontal Furnaces

General Information

iLab Name: Tube 01 Clean Ox, Tube 04 Field Ox, Tube 05 Anneal, Tube 07 General Ox, Tube 08 Phos Drive, Tube 09 TEOS

iLab Core: BRK Furnace Core

FIC: Shared

Owner: Dan Hosler

Location: Cleanroom R Bay

Max Wafer Size: 6 inch (150 mm)

System Information

General Description

Horizontal furnaces for a variety of processes.

Capabilities

Process Capabilities:

  • Tube 01 - Wet / Dry Oxidation (Super-Clean Si users only)
  • Tube 04 - Wet / Dry Oxidation (For general use)
  • Tube 05 - Anneal
  • Tube 07 - Wet / Dry Oxidation (For III/V Materials)
  • Tube 08 - Phosphorous Deposition (not yet operational)
  • Tube 09 - Phosphorous Drive-In (not yet operational)

Process Temperatures:

  • Tube 01 - 1100°C maximum
  • Tube 04 - 1100°C maximum
  • Tube 05 - 1100°C maximum
  • Tube 07 - 1100°C maximum
  • Tube 08 - 1100°C maximum
  • Tube 09 - 1100°C maximum

All furnace tubes are capable of samples up to 6 inches in diameter.

Materials Compatibility

Check with particular tube

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.