Protemp Horizontal Furnaces

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Protemp Horizontal Furnaces

General Information

iLab Name: Tube 02 Nitride Dep, Tube 03 LTO Dep, Tube 06 Polysilicon

iLab Core: BRK Furnace Core

FIC: Shared

Owner: Rich Hosler

Location: Cleanroom R Bay

Max Wafer Size: 6 inch (150 mm)

System Information

General Description

Horizontal furnaces for a variety of processes.

Capabilities

Processes Capabilities:

  • Tube 02 - LPCVD Nitride Deposition
  • Tube 03 - Low Temperature Oxide Deposition
  • Tube 06 - Polysilicon Deposition (not yet operational)

Process Temperatures:

  • Tube 02 - 800°C maximum
  • Tube 03 - 400°C maximum
  • Tube 06 - 650°C maximum

All furnace tubes are capable of samples up to 6 inches in diameter.

Materials Compatibility

Check with particular tube

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.