Nitric Oxide Anneal
General Information
iLab Name: Nitric Oxide Anneal
iLab Core: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom P Bay
Max Wafer Size: 3 inch (75 mm)
System Information
General Description
Capabilities
- Process gases include Nitric Oxide, and Argon.
- Able to achieve temperatures of 1150°C
Materials Compatibility
Notes
Useful Links
* Must use iLab and be a trained user to reserve a slot on this system.
