Blue M Oven

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Blue M Oven Blue M Oven

General Information

iLab Name: Blue M Furnace

iLab Core: BRK Furnace Core

FIC: Shared

Owner: Rich Hosler

Location: Cleanroom P Bay

Max Wafer Size: 2 inch (50 mm)

System Information

General Description

A table-top general purpose oven for inert and forming gas ambient conditions. Ramps to 1100C.

Capabilities

  • Four process gases, N2, Ar, O2, and Forming Gas.
  • Capable of temperatures up to 1100°C (single temperature zone)
  • Samples lay horizontally on a quartz plate boat.
  • The quartz tube is 3" in diameter.

Materials Compatibility

Not Applicable

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