Anneal

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Anneal

General Information

iLab Name: Nitrogen Anneal Furnace

iLab Core: BRK Furnace Core

FIC: Shared

Owner: Dan Hosler

Location: Cleanroom P Bay

Max Wafer Size: 5 inch (125 mm)

System Information

General Description

This 3-zone furnace is capable of high-temperature annealing in a nitrogen environment. Temperatures can go to 1100 C max.

Capabilities

  • A small, 3-zone furnace used for annealing samples and wafers up to 5" (125 mm)
  • No ammonia capability at this time due to safety hazards
  • Only capable of nitrogen processing at this time
  • 1100°C maximum temperature

Materials Compatibility

Not Applicable

Notes

No ammonia capability at this time due to safety hazards

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.