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General Information

iLab Name: Heidelberg

iLab Core: BRK Lithography Core

Owner: Mike Courtney

Location: Cleanroom

Max Wafer Size: 9

System Information

General Description

The Heidelberg DLW 66fs is a laser writer that can do direct write on wafers or write reticles.


The system will have a 1um resolution lens, 375nm laser, autofocus, and backside alignment capability.

Materials Compatibility

Not Applicable

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* Must use iLab and be a trained user to reserve a slot on this system.