Vistec VB6

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Vistec VB6

General Information

iLab Name: VB6

iLab Core: BRK Lithography Core

FIC: Minghao Qi

Owner: Bill Rowe

Location: Cleanroom Bay N

Max Wafer Size: 6

System Information

General Description

  • The Leica VB6 is a 100kV, Ultra-High Resolution, Widefield electron beam lithography tool.
  • It is an excellent research tool for imaging IC designs, MEMS designs, and NanoCarbon/Nanotube work on the nanotech level.


  • It can image small wafer samples up through 154.2mm wafers.
  • It can image 5 inch and 6 inch photomasks.
  • It can produce geometries down to 6nm in size.
  • Field sizes up to 1.310mm for reduced stage movements
  • Can write with a current of 200 pico amps up to 100 nano amps

Materials Compatibility

Not Applicable

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.