Desk-Top Precision Spin Coating Systems

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Desk-Top Precision Spin Coating Systems

General Information

iLab Name: Spinner1 and Spinner2

iLab Core: BRK Lithography Core

FIC: David Janes

Owner: Mike Courtney

Location: Cleanroom Bay M, Cleanroom Bay N

Max Wafer Size: 6

System Information

General Description

The G3 Wafer Spinner is a compact desktop spin coater designed for low production spin coating applications and experimentation. The G3 Spin coater provides the ability to hold the product wafer with a vacuum chuck and spin that chuck at precise speeds and for controlled periods of time.

Capabilities

The G3 Spin coater has a vast array of chucks. Chuck sizes will accommodate sample sizes less than 1 centimeter and as large as whole 6 inch wafers.

Materials Compatibility

Not Applicable

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.