March Jupiter II and Jupiter III RIEs

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March Jupiter II and Jupiter III RIEs March Jupiter II and Jupiter III RIEs

General Information

Owner: Francis Manfred

Location: Cleanroom Bay L

Max Wafer Size: 150 mm

System Information

General Description

Replacements for the PlasmaTech RIE, with some notable improvements.

Capabilities

Jupiter II: 600 W Power Supply, O2, Ar, SF6, and CF4 processing in the 100-mTorr range.

Jupiter III: 300 W Power Supply, O2 processing plus one other to-be-determined gas. For use as a backup when the Jupiter II is out of order.

Materials Compatibility

For use with most substrates including silicon, oxide, and organics.

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.