Tegal Corp. Plasmod Plasma Etcher

Printable version

Tegal Corp. Plasmod Plasma Etcher

General Information

FIC: Shared

Owner: Lisa Reece

Location: 2081

Max Wafer Size: 4

System Information

General Description

Bench-top plasma etcher for wafer fabrication - cleans organic residues and oxidizes surfaces

Capabilities

4" diameter chamber / uses room air for oxygen source

Materials Compatibility

Cleans organic residues and oxidizes surfaces

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.