Spin Rinse Dryer

Printable version

Spin Rinse Dryer

General Information

FIC: Yi Xuan

Owner: Justin Wirth

Location: Cleanroom D Bay

Max Wafer Size: 4

System Information

General Description

Full cassette spin rinse dryer

Capabilities

Rinse and spin dry full cassette of wafers.

Materials Compatibility

Not Applicable

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.