PerkinElmer 2400 Sputterer

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PerkinElmer 2400 Sputterer

General Information

iLab Name: Perkin Elmer 2400

iLab Core: BRK Evaporation/Sputtering Core

FIC: David Janes

Owner: Dave Lubelski

Location: Cleanroom-Bay S

Max Wafer Size: 8

System Information

General Description

  • 500 Watt RF power supply for mangnatron sputtering
  • one 8" diameter table to load substrate
  • chamber holds three 8" diameter targets

Capabilities

Targets installed are Ti, Al with 1% Si, and WSi4

Materials Compatibility

Not Applicable

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.