PVD Sputterer - Flexible Substrates

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PVD Sputterer - Flexible Substrates

General Information

iLab Name: PVD Sputtering Organic

iLab Core: BRK Evaporation/Sputtering Core

FIC: Hugh Lee

Owner: Dave Lubelski

Location: Cleanroom Bay S

Max Wafer Size: 4

System Information

General Description

Flexible Substrates Sputtering System


DC/RF sputtering capable, 2" targets, base pressure 5x10-6torr.

Materials Compatibility

For use with substrates of organic materials, polyimides, parylene, etc.

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* Must use iLab and be a trained user to reserve a slot on this system.