Carbon Nanotube PECVD

Printable version

Carbon Nanotube PECVD

General Information

FIC: Tim Fisher

Owner: Dave Lubelski

Location: brk2283

Max Wafer Size: 2

System Information

General Description

Seki Techtron Diamond PECVD modified to grow carbon nanotubes.


Limited access, see PI

Materials Compatibility

Check with Tim Fisher

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.