Axic PECVD

General Information
iLab Name: Axic
iLab Core: BRK Growth Core
FIC: Shared
Owner: Sean Rinehart
Location: Cleanroom Bay R
Max Wafer Size: 8
System Information
General Description
Capabilities
The system has following gases:
- 10% Silane (SiH4)/balance N2
- N2O
- NH3
- CF4
- O2
- N2
It accommodate up to 8" substrate or a variety of smaller substrate sizes.
- Maximum RF power: 600W @ 13.56MHz
- Maximum electrode temp: 300C
- Minimum base pressure: 20 mTorr
Materials Compatibility
Useful Links
* Must use iLab and be a trained user to reserve a slot on this system.