Oxide PLD system

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Oxide PLD system

General Information

iLab Name: PLD

iLab Core: BRK Evaporation/Sputtering Core

FIC: Alexandra Boltasseva

Owner: Dave Lubelski

Location: BRK 1217

Max Wafer Size: 2

System Information

General Description

Versatile pulsed laser deposition system dedicated to oxides Manufacturer: PVD Products, Inc.


Materials Compatibility

Non-outgassing materials