Veeco Thermal Evaporator

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Veeco Thermal Evaporator

General Information

iLab Name: Veeco Thermal 1

iLab Core: BRK Evaporation/Sputtering Core

FIC: Minghao Qi

Owner: Dave Lubelski

Location: Cleanroom-Bay L

Max Wafer Size: 4

System Information

General Description

  • Thermal evaporates materials with a 4 electrodes
  • Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
  • uses an Inficon deposition controller to monitor deposition thickness


Materials include: Ti, Ni, Fe, Co, Al, Cu

Materials Compatibility

Ti, Ni, Fe, Al, Cu, PY

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.