Varian E-beam Evaporator

Printable version

Access iLab page

Varian E-beam Evaporator

General Information

iLab Name: Varian Ebeam

iLab Core: BRK Evaporation/Sputtering Core

FIC: Minghao Qi

Owner: Kenny Schwartz

Location: Cleanroom-Bay K

Max Wafer Size: 4

System Information

General Description

  • E-beam evaporates materials with a 4 pocket hearth
  • Organic substrates allowed
  • Pockets hold 3.7 cc crucible liners
  • Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
  • uses an Inficon deposition controller to monitor deposition thickness

Capabilities

Materials: Au, Ti, Cr, Al, Ni, Cu, SiO2

Materials Compatibility

Ge, Ni, Fe, Ag, NiFe, Au, Ti, Al2O3, ITO, SiO2, Cu, Al, Pd

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.