Leybold E-beam Evaporator

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Leybold E-beam Evaporator

General Information

iLab Name: Leybold

iLab Core: BRK Evaporation/Sputtering Core

FIC: Minghao Qi

Owner: Kenny Schwartz

Location: Cleanroom-Bay K

Max Wafer Size: 4

System Information

General Description

  • E-beam evaporates materials with a 6 pocket hearth
  • Pockets hold 15cc pocket volume with 8.2cc liner volume
  • Substrate fixture can hold two 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
  • Telemark controller
  • Deposition rates from 0.2 - 8.0 Angstroms/sec

Capabilities

Materials: Ti, SiO2, Al, Fe, Ag, Al2O3, Ni, Au, Cr, Pd, NiCr, Co, Pd

Materials Compatibility

Ti, Co, Cu, Al, Ni, Ag, PY, Al2O3, SiO2, Au, Fe, Cr

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