Lesker E-Beam Evaporator

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Lesker E-Beam Evaporator

General Information

iLab Name: Lesker Ebeam

iLab Core: BRK Evaporation/Sputtering Core

FIC: Shared

Owner: Dave Lubelski

Location: Cleanroom-Bay K

Max Wafer Size: 6

System Information

General Description

  • Six Pocket E-Beam Evaporator
  • Water-cooled, rotatable stage
  • Used for Au, Ti, Ni, Cr, Pd, Al
  • Quick pumpdown to 5x10-7 torr
  • Handles up to 6" substrate

Capabilities

  • High Purity metal evaporator - Materials are limited to Au, Cr, Ti, Ni, Al, Pd, Mo, Pt
  • Deposition rates range from .2-10 Angstroms/sec
  • System Pressures of 5x10-8 torr
  • Primarily used for deposition of device quality Gold

Materials Compatibility

Ti, Au, Cr, Pt, Al, Ni, Mo, Pd

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