Airco E-beam Evaporator

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Airco E-beam Evaporator

General Information

iLab Name: Airco

iLab Core: BRK Evaporation/Sputtering Core

FIC: Hugh Lee

Owner: Kenny Schwartz

Location: Cleanroom-Bay L

Max Wafer Size: 5

System Information

General Description

  • E-beam evaporates materials with a 4 pocket hearth
  • Pockets hold 3.7 cc crucible liners
  • Substrate fixture can hold four 4" wafers with rotation
  • uses a Telemark 860 deposition controller to monitor deposition thickness
  • uses a load lock vacuum system.


Organic substrates allowed

Fully automatic system. 

Materials Compatibility

Source Materials: Au, Pt, Ti, Cr, Cu, SiO2, Al2O3, Al, Si, Ni, NiCr, Ag, Pd

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