Gemstar ALD in Glovebox

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Gemstar ALD in Glovebox

General Information

FIC: Piede Ye

Owner: Jerry Shepard

Location: Cleanroom Bay G

Max Wafer Size: 2

System Information

General Description

Gemstar ALDs in inert atmosphere glovebox


Please see PI for sample approval.

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.