Aixtron BlackMagic ALD

Printable version

General Information

FIC: Piede Ye

Owner: Jerry Shepard

Location: Cleanroom Bay G

Max Wafer Size: 2

System Information

General Description

Graphene based thermal and plasma ALD.


Please see PI for sample approval.

Materials Compatibility

Ti, Au, Cr, Pt

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.