Specialty Coating Systems 6800 Spin Coater

General Information
FIC: Shared
Owner: Mike Courtney
Location: 2031
Max Wafer Size: 4 in.
System Information
General Description
Capabilities
- Type CS Chuck: Flat Surface Cross and Scroll - Used to hold a thin, planar substrate such as silicon, glass or germanium on a spinning shaft for maximum rotational speed. Has cross and scroll design. Precise control of spin speed and acceleration/deceleration rates
- Easy-to-use keypad and LCD display on the front panel
- Clear cover features a dispensing slot and safety interlock
- Non-programmable model (8-inch) can store and execute a single recipe with up to four steps
- Programmable models (8- and 12-inch) can store and execute up to three recipes with eight steps each.
- Bowl Size - Programmable 8 in. and 12 in.
- Rotational Speed 0 to 9,999 RPM in 1 RPM increments
- Acceleration/Deceleration 0.1 to 30 seconds in 0.1 second increments
- Dwell Time 0 to 999 seconds in 1 second increments
- Dispense Time 10 to 30 seconds in 0.1 second increments (programmable model only)
- Dimensions (W x D x H) 13.25 x 18 x 10.8 in / 33.7 x 45.7 x 27.4 cm
Materials Compatibility
Useful Links
* Must use iLab and be a trained user to reserve a slot on this system.
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