Birck Nanotechnology Center

Specialty Coating Systems 6800 Spin Coater

Printable version

Specialty Coating Systems 6800 Spin Coater

General Information

FIC: Shared

Owner: Mike Courtney

Location: 2031

Max Wafer Size: 4 in.

System Information

General Description

Spin Coater Series allows for the uniform application of photoresists, polyimides, metal-organics, dopants, silica films and most organic and aqueous solutions to planar substrates.

Capabilities

  • Type CS Chuck: Flat Surface Cross and Scroll - Used to hold a thin, planar substrate such as silicon, glass or germanium on a spinning shaft for maximum rotational speed. Has cross and scroll design. Precise control of spin speed and acceleration/deceleration rates
  • Easy-to-use keypad and LCD display on the front panel
  • Clear cover features a dispensing slot and safety interlock
  • Non-programmable model (8-inch) can store and execute a single recipe with up to four steps
  • Programmable models (8- and 12-inch) can store and execute up to three recipes with eight steps each.
  • Bowl Size - Programmable 8 in. and 12 in.
  • Rotational Speed 0 to 9,999 RPM in 1 RPM increments
  • Acceleration/Deceleration 0.1 to 30 seconds in 0.1 second increments
  • Dwell Time 0 to 999 seconds in 1 second increments
  • Dispense Time 10 to 30 seconds in 0.1 second increments (programmable model only)
  • Dimensions (W x D x H) 13.25 x 18 x 10.8 in / 33.7 x 45.7 x 27.4 cm

Materials Compatibility

Misc.

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.