Isotemp Vacuum Oven Model 281A

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Isotemp Vacuum Oven Model 281A

General Information

FIC: Steve Jurss

Owner: Tim Kwok

Location: 2031, 2037

Max Wafer Size: 4 in.

System Information

General Description

Vacuum oven suitable for baking lithography samples, glassware, chemical samples


  • Operating Features - Capacity: 0.65 cu. ft. (0.02 m3)
  • Dial-in temperatures up to 280°C (536°F)
  • Maintains 30 in. Hg (762mm) vacuum with less than 1/2 in. Hg (12.7mm) loss per day
  • Automatic temperature backup control takes over if the temperature rises more than 5°C over setpoint; constancy ±1.0°C at ultimate vacuum; control sensitivity ± 1.0°C; warning light alerts of failure

Materials Compatibility


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