Kratos X-ray Photoelectron Spectrometer

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Kratos X-ray Photoelectron Spectrometer

General Information

iLab Name: Kratos AXIS Ultra DLD Imaging X-ray Photoelectron Spectrometer (XPS)

iLab Core: BRK Metrology Core

Owner: Dmitry Zemlyanov

Location: Birck 1077

System Information

General Description

X-ray Photoelectron Spectroscopy (XPS) provides information about the element and chemical composition of a substrate. The AXIS ULTRA DLD incorporates quantitative real-time parallel XPS imaging with a lateral resolution of 5 µm. The system integrates:

  • The Kratos patented magnetic immersion lens
  • A charge neutralization system
  • Spherical mirror and concentric hemispherical analyzers combined with the newly developed delay-line detector (DLD)
  • Fast load lock with cryo/heating options
  • A catalytic cell to facilitate substrate treat and preparation (up to 7bar at 1000C)
  • Monochromatic Al Ka (1486.6 eV) and Ag La (2984.3 eV) anodes
  • Non-monochromatic dual anode X-ray gun with Al Ka (1486.6 eV) and Mg Ka (1253.6 eV)
  • Stuttering ion gun (Ar, He)
  • External ports for user-supplied facilities
  • Oxygen-free glove box


The technique can analyze any vacuum-compatible substrate.

Materials Compatibility

Not Applicable

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.