Kratos X-ray Photoelectron Spectrometer

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Kratos X-ray Photoelectron Spectrometer

General Information

iLab Name: Kratos AXIS Ultra DLD Imaging X-ray Photoelectron Spectrometer (XPS)

iLab Core: BRK Metrology Core

Owner: Dmitry Zemlyanov

Location: Birck 1077

System Information

General Description

X-ray Photoelectron Spectroscopy (XPS) provides information about the element and chemical composition of a substrate. The AXIS ULTRA DLD incorporates quantitative real-time parallel XPS imaging with a lateral resolution of 5 µm. The system integrates:


The technique can analyze any vacuum-compatible substrate.

Materials Compatibility

Not Applicable