Bruker GT-K1 Optical Profilometer

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General Information

iLab Name: Bruker GT-K

iLab Core: BRK Metrology Core

FIC: Shared

Owner: Sean Rinehart

Location: Cleanroom Bay P

Max Wafer Size: 6"

System Information

General Description

The Contour GT-K is a non-contact 3-dimension optical profiler that uses white light interferometric (WLI) hardware combined with 64-bit, multi-core operation and analysis software (Vision64™). It can be used to profile reflective surfaces (e.g. silicon and metals) and also thick (> 2µm) transparent films on a reflective surface like photoresists on a silicon substrate.

Capabilities

  • Equipment sits on a vibration isolation table
  • Can analyze samples up to 6” wafers (xy range)
  • 0.1nm to 10mm vertical measurement range (z scan range)

Optics:

  • 5X Michelson interferometric objective, working distance: 6.71mm
  • 10X Mirau interferometric objective, 7.4mm working distance
  • 50X interferometric objective, 3.4mm working distance
  • 0.55X, 1.0X and 2.0X FOV multiplier tubes
  • Magnification ranges from 2.75X to 100X

Materials Compatibility

Not Applicable

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.