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General Information

iLab Name: XRD

iLab Core: BRK Metrology Core

FIC: Michael Capano

Owner: Dmitry Zemlyanov

Location: brk1045

Max Wafer Size: 4

System Information

General Description

  • Panalytical MRD X'Pert Pro High Resolution XRD
  • Primarily for high resolution single crystal diffraction


  • 12 arc second resolution. Peak matching database. Epitaxy and reflectivity simulation tools.
  • small samples to 4 inch wafers

Materials Compatibility

Not Applicable

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.