Filmetrics

General Information
iLab Name: Filmetrics
iLab Core: BRK Metrology Core
FIC: Shared
Owner: Sean Rinehart
Location: Cleanroom Bay S
Max Wafer Size: 8
System Information
General Description
Capabilities
Measured films should be optically smooth. Very rough films and opaque films can not be measured.
- Thickness Measurement Range: nm to micron range
- Optical Constant Measurement Range: 1000A and 10um
- Thickness Accuracy: +/- 1nm at 500nm
- Wavelength Range: 400nm to 1000nm
Materials Compatibility
Useful Links
* Must use iLab and be a trained user to reserve a slot on this system.
- Optical Properties
- Cleanroom Ellipsometer
- Filmetrics
- Home-built Z-scan setup
- SpectraPhysics Spitfire femtosecond CPA system with TOPAS parametric generator
- Thin Film Stress Machine
- Ultraspec 2100 PRO Optical Filter Spectrophotometer
- J.A. Woollam V-VASE UV-VIS-NIR spectroscopic ellipsometer
- Waveguide Characterization