Birck Nanotechnology Center

Filmetrics

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Filmetrics

General Information

iLab Name: Filmetrics

iLab Core: BRK Metrology Core

FIC: Shared

Owner: Sean Rinehart

Location: Cleanroom Bay S

Max Wafer Size: 8

System Information

General Description

The Filmetrics is used to measure the thickness and optical constants (n and k) of transparent and semi-transparent thin film such as oxides, nitrides, resists, polyimides, polysilicon. The Filmetrics measures film characteristics by reflecting light and then analyzing this light over a range of wavelengths.

Capabilities

Measured films should be optically smooth. Very rough films and opaque films can not be measured.

  • Thickness Measurement Range: nm to micron range
  • Optical Constant Measurement Range: 1000A and 10um
  • Thickness Accuracy: +/- 1nm at 500nm
  • Wavelength Range: 400nm to 1000nm

Materials Compatibility

Not Applicable

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.