Cleanroom Ellipsometer

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Cleanroom Ellipsometer

General Information

iLab Name: Cleanroom Ellipsometer

iLab Core: BRK Metrology Core

FIC: Shared

Owner: Dan Hosler

Location: Cleanroom P Bay

Max Wafer Size: 6 inch (150 mm)

System Information

General Description

The cleanroom Ellipsometer can measure the thickness and refractive index of thin films on reflective substrates, as well as the optical properties of bare substrates.

Capabilities

  • The stage can handle up to a 6 inch wafer diameter
  • The ellipsometer utilizes a single laser at a wavelength of 6328Å
  • Film Thickness Range: 0-60,000 Angstroms
  • Spot size is approximately 1mm by 3mm
  • Your substrate must be polished and must not rough to defract the laser

Materials Compatibility

Not Applicable

Notes

Please know the optical constants (refractive index and extinction coefficient) of both your film to be measure, and the substrate you are measuring upon.

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.