Veeco Dimension AFM

Printable version

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Veeco Dimension AFM

General Information

iLab Name: Nanoman AFM

iLab Core: BRK Metrology Core

FIC: Shared

Owner: Joon Park

Location: Cleanroom E Bay

Max Wafer Size: 6

System Information

General Description

Veeco Dimension 3100 AFM

  • Nanomanipulation
  • Nanolithography
  • Conductive AFM module

Used to investigate sample surfaces.



  • X&Y Scan range: 90 µm square, lateral accuracy typically within 1%, max. 2%.
  • Z range: 5 µm Electronic resolution: 16-bit on all axes for all scan sizes and offsets.

Materials Compatibility

Not Applicable

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.