Dimension 3100 Scanning Probe Microscope (Veeco)

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Dimension 3100 Scanning Probe Microscope (Veeco)

General Information

iLab Name: DI3100 BRK1265

iLab Core: BRK Metrology Core

FIC: Helen McNally

Owner: Joon Park

Location: BNC 1265

Max Wafer Size: 6

System Information

General Description

The Dimension 3100 provides high resolution, three dimensional images.



  • X&Y Scan range: 90 µm square, lateral accuracy typically within 1%, max. 2%.
  • Z range: 5 µm
  • Electronic resolution: 16-bit on all axes for all scan sizes and offsets.

Materials Compatibility

Not Applicable

Useful Links

* Must use iLab and be a trained user to reserve a slot on this system.