Hitachi S-4800 Field Emission SEM

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Hitachi S-4800 Field Emission SEM

General Information

iLab Name: Hitachi S-4800 Field Emission SEM

iLab Core: BRK Electron Microscopy Core

FIC: Volkan Ortalan

Owner: Rosa Diaz

Location: BRK 1235

Max Wafer Size: 4

System Information

General Description

The S-4800 Cold Field Emission SEM combines the outstanding high resolution performance capabilities to offer superb resolution of ~ 2.0 nm at 30 kV.

Capabilities

  • Accelerating voltages are from 500 V to 30 kV
  • Resolution ~ 2.0 nm at 30 kV
  • A choice of specimen stage: 4", 2" and 1" wafer and cross section

Materials Compatibility

Not Applicable

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