Probe Station III

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Probe Station III Probe Station III

General Information

iLab Name: Cleanroom Probe 1

iLab Core: BRK Characterization Core

FIC: Shared

Owner: Nithin Raghunathan

Location: Cleanroom

Max Wafer Size: 4

System Information

General Description

Probe Station III consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an HP4156A Semiconductor Parameter Analyzer.

Materials Compatibility

Not Applicable