Equipment Overview - Laboratory & Cleanroom Equipment

The Birck Nanotechnology Center provides 22,000 square feet of laboratory space and an extensive equipment set provides extraordinary capabilities. Additionally, 25,000 square feet of cleanroom space and a wide variety of equipment supports diverse research needs. The entire set of resources provided by this 186,000 square foot facility are designed to support collaborative interdisciplinary research in nanotechnology.

Atomic Force Microscopy | Surface Analysis | Electron Microscopy | Analytical Systems | Laser Systems | Crystal Growth and Deposition Systems | BSL-2 Laboratories | BSL-1 Laboratories | Electrical Characterization | Lithography | Lithography - Maskmaking | Dry Etching and Cleaning | Metal Deposition | Deposition Systems | Ion Implant and Thermal Processing | Wet Etching and Cleaning | Other Systems

Atomic Force Microscopy

Laboratories

• Molecular Imaging AFM
• Haptic AFM
• DI 3100 AFMs (2)
• Bio-Scope II AFM
• Asylum Research 3-D Atomic Force Microscope (AFM)
• Veeco Atomic Force Microscope (AFM)

Cleanroom

• Veeco Atomic Force Microscope (AFM)

Surface Analysis

Laboratories

• Omicron Multi-Technique Surface Analysis Cluster Tool
  • High-Resolution Electron Energy Loss Spectrometer (EELS); Scanning Electron Microscope (SEM)
  • Hemispherical Electron Spectrometer for XPS, AES, UPS, ISS
  • Scanning Auger Spectrometer
  • Focused Ion Beam (FIB)
  • All interconnected under high vacuum
• Kratos Imaging X-Ray Photoemission Spectrometer (XPS)
• Omicron Ultra-High Vacuum (UHV) Scanning Tunneling Microscope (STM)

Electron Microscopy

Laboratories

• Titan 80-300 keV Field-Emission Environmental Transmission Electron Microscope / Scanning Transmission Electron Microscope from the FEI Corporation
• H4700 Field-Emission Scanning Electron Microscope from the Hitachi Corporation
• “NovaLab” Focused Ion Beam / Scanning Electron Microscope (FIB/SEM) from the FEI Corporation

Cleanroom

• JEOL Dual-Function Scanning Electron Microscope with Photolithographic Capability
• Focused Ion Beam Analysis System (FIB)

Analytical Systems

Laboratories

• X-Ray Diffraction System
• Near-Field Scanning Optical Microscope (NSOM)
• Raman Spectroscopy System
• Near-Field Scanning Optical Microscope
• Spectrophotometer
• Fourier Transform Infrared Spectrometer
• Dynamic Light Scattering Apparatus
• Ellipsometer
• Langmuir-Blodgett Apparatus
• Mass Spectrometer

Laser Systems

Laboratories

• Pulsed Laser Deposition System
• Photoluminescence System
• Laser-Based Microfluidic Analysis System
• Laser-Based Nanolithography System
• Free-Space Laser

Cleanroom

• Interference Lithography System

Crystal Growth and Deposition Systems

Laboratories

• Varian Gen-II Molecular Beam Epitaxy (MBE) System
• Aixtron AIX 200/4 Metal-Organic Chemical Vapor Deposition (MOCVD) System
• Epigress VP-508 Horizontal Hot-Wall CVD Reactor
• Halide Vapor-Phase Epitaxy (HVPE) System
• SEOCAL 5200S microwave plasma chemical vapor deposition system
• Field-Emission Vacuum System

BSL-2 Laboratories

Laboratories

• Micromanipulator Probe Stations (2)
• Bio-Safety-Level 2 Cabinets (2)
• Sample Glove Boxes (2)
• Fluorescence Microscopes (2)
• Laser Doppler Vibrometer
• Autoclave
• Bio-Safety-Level 2 Cabinets (2)
• Sample Freezers (2)
• Sample Refrigerators (2)
• Cell Culture Rooms (2)

BSL-1 Laboratories

Laboratories

• Critical Point Dryer
• Micromanipulator Probe Station
• Optical Table
• Stereolithography
• Lab 2081
• Equipment
• Micromanipulator Probe Stations (2)
• Atomic Force Microscope
• Sample Refrigerator
• Quartz Crystal Microbalance
• Surface Plasmon Resonance

Electrical Characterization

Laboratories

• Shielded Micromanipulator Probe Stations (6)
  • HP 4156A Semiconductor Parameter Analyzers (2)
  • HP 4284A LCR Meters
  • Keithley Hi-Lo Capacitance System
  • HP 4140B Picoammeter
  • Tektronix 371A High-Voltage Curver Tracer
  • Etc...
• Low-Temperature Probe Station
• Mercury Probe
• Hall Measurement Systems (3)
• Cascade Probe Station
• HP 8505A Network Analyzer
• HP 851B Spectrum Analyzer
• Tektronix 2755 Spectrum Analyzer
• HP 8503A S-Parameter Test Set

Lithography

Cleanroom

• Leica VB-6 Ultra-High Resolution, Extra-Wide Field Electron Beam Lithography Tool, Capable of 6 nm Resolution in Resist
• JEOL Dual-Function Scanning Electron Microscope with Lithographic Capability
• Optical Photomask Aligner and Exposure Systems
  • Canon PLA-501F
  • Karl Suss MJB-3 (2)
  • Karl Suss MABA-6
  • Karl Suss MA-25 Double-Sided Optical Photomask Aligner and Exposure System
  • Karl Suss SB-6E Wafer Bonding System
• Photoresist Application and Development Spinners
• Interference Lithography System

Lithography - Maskmaking

Cleanroom

• TRE Electromask Pattern Generator (2)
• Photoresist Application and Development Spinners
• YES Image Reversal System
• APT Automated Plate Processor

Dry Etching and Cleaning

Cleanroom

• STS Deep Reactive Ion Etch (RIE) Systems (2)
• Drytek Triode RIE
• PlasmaLab RIE
• XeF2 Etching System
• UV-Ozone Cleaner
• Branson Plasma Asher

Metal Deposition

Cleanroom

• Veeco 7760 Thermal Evaporator
• Airco-Temescal FDC-1800 Electron-Beam Evaporator
• Varian e-Beam Evaporator
• Leybold e-Beam Evaporator
  
• CHA e-Beam Evaporator
  
• Perkin-Elmer e-Beam Evaporator
  
• Perkin-Elmer 2400 Sputterer
  
• MRC 903 Sputterer
  
• CVC Sputtering System

Deposition Systems

Cleanroom

• AXIC PECVD System
  
• Vertical LPCVD Furnace System
  
• F-120 Atomic Layer Deposition (ALD) System
  
• F-450 Atomic Layer Deposition (ALD) System

Ion Implant and Thermal Processing

Cleanroom

• Eaton 6200A Ion Implanter
  
• Rapid Thermal Processing
  
• Vertical Oxidation / Diffusion Furnaces (5)
  
• Pyrogenic Oxidation System
  
• Blue-M Oxidation Furnace
  
• Lindberg Oxidation Furnace
  
• Nitric Oxide Annealer

Wet Etching and Cleaning

Laboratories

• Dual-purpose acid/solvent fume hoods (30)
  
  • Must be designated acid or solvent
    
• Dual-function fume hood for acids and solvents (2)

Cleanroom

• Acid fume hoods (4)
  
• Solvent fume hoods (8)
  
• Dual-function fume hood for acids and solvents

Other Systems

Laboratories

• Chemical-Mechanical Polish (CMP) system
  
• Bonding
  
  • Wire
    
  • Ribbon
    
  • Ball
    
• Dicing Saw