PRISM at Discovery Park

Abstract:

Radio-frequency microelectromechanicalsystems (RF MEMS) are widely used for contact actuators and capacitativeswitches, and involve metal-dielectric contact. Proper understanding of structure-electrostatics interaction is necessary to prevent failure of these systems. In these devices, the structure is activated by an electrostatic force, whose magnitude changes as the gap closes. Accurate modeling of fluid-structure-electrostatics interaction is important to determine device dynamical behavior, and ultimately, device lifetime. It is advantageous to model fluid and structural mechanics and electrostatics within a single comprehensive numerical framework to facilitate coupling between them.