NNSA PRISM Seminar Series: "Advanced Silicon Technology & MEMS Reliability"
December 4 @ 3:00 PM - 4:00 PM - Birck Nanotechnology Center, Room 1001
This talk will highlight some of the advanced Si technologies being developed at MIT Lincoln Laboratory, including FDSOI CMOS for extreme environments, 3D integration, digital focal planes, RF MEMS and microfluidics. RFMEMS reliability and science will be covered more detail. RFMEMS technologies have been developed by many researchers and companies over the last 10 years. The RF excellent performance of these devices and circuits has been clearly demonstrated. Hero results for reliability have been demonstrated, several achieving over 1 trillion cycles. Reliability for DoD and commercial applications is still an issue for RF MEMS. Packaging, surface conditions, and ambient environments play a key role. This talk will discuss some of the successful RF MEMS switch designs and applications as well as provide insight to reliability aspects of these devices.
- Mari-Ellyn Brock