Birck Nanotechnology Center

Desk-Top Precision Spin Coating System

General InformationSpinner1

Equipment Name: Desk-Top Precision Spin Coating System

Coral Name: not listed

FIC: David Janes

Process/Equipment Owner: Mike Courtney

Location: Clanroom Bay M Cleanroom Bay N

Max Wafer Size: 6


System Information

General Description: The G3 Wafer Spinner is a compact desktop spin coater designed for low production spin coating applications and experimentation.The G3 Spin coater provides the ability to hold the product wafer with a vacuum chuck and spin that chuck at precise speeds and for controlled periods of time.

Capabilities: The G3 Spin coater has a vast array of chucks. Chuck sizes will accommodate sample sizes less than 1 centimeter and as large as whole 6 inch wafers.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.



Operators Manual pdf