Birck Nanotechnology Center

PVD E-Beam Evaporator

General Information

Equipment Name: PVD E-Beam Evaporator

Coral Name:

FIC: Shared

Process/Equipment Owner: Dave Lubelski

Location: Cleanroom Bay "K"


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System Information

General Description:

* Six Pocket E-Beam Evaporator used for Ferro-magnetic materials

System Capabilities:

* High Purity metal evaporator - Materials are limited to Cu, Ti, Al, Fe, Ni, Co
* Base system pressure 2x10-9 torr
* Accomodates wafers up to 4" diameter
* Rotatable stage can be Water or LN2 cooled
* Atmosphere to deposition in 15 minutes
* Gridless Argon sputtering gun for O2 removal
* Capable of angled deposition at 30 or 45 degrees

Useful System Links

Equipment Use Fees
Reserve System*
*Must install Coral and be a trained user to reserve a slot on this system.