PVD E-Beam Evaporator
General Information
Equipment Name: PVD E-Beam Evaporator
Coral Name:
FIC: Shared
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom Bay "K"
Superusers:
System Information
General Description:
* Six Pocket E-Beam Evaporator used for Ferro-magnetic materials
System Capabilities:
* High Purity metal evaporator - Materials are limited to Cu, Ti, Al, Fe, Ni, Co
* Base system pressure 2x10-9 torr
* Accomodates wafers up to 4" diameter
* Rotatable stage can be Water or LN2 cooled
* Atmosphere to deposition in 15 minutes
* Gridless Argon sputtering gun for O2 removal
* Capable of angled deposition at 30 or 45 degrees
Useful System Links
Equipment Use FeesReserve System*
*Must install Coral and be a trained user to reserve a slot on this system.