Probe Station III
Equipment Name: Probe Station III
Process/Equipment Owner: Aamer Mahmood
Location: BRK 2261
Max Wafer Size: 4
Probe Station III consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an HP4156A Semiconductor Parameter Analyzer, an HP 4284A Precision LCR Bridge, and a Tektronix 371A High-Power Curve Tracer. Both regular and heated sample chucks are available. A Windows-NT PC running Labview is used to drive the instruments and collect the data.
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.