Birck Nanotechnology Center

Probe Station III

General Information

Equipment Name: Probe Station III

Coral Name:

FIC: Shared

Process/Equipment Owner: Aamer Mahmood

Location: BRK 2261

Max Wafer Size: 4

1 2

System Information

General Description:

Probe Station III consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an HP4156A Semiconductor Parameter Analyzer, an HP 4284A Precision LCR Bridge, and a Tektronix 371A High-Power Curve Tracer. Both regular and heated sample chucks are available. A Windows-NT PC running Labview is used to drive the instruments and collect the data.

Useful System Links

Equipment Use Fees
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*Must install Coral and be a trained user to reserve a slot on this system.