Birck Nanotechnology Center

Probe Station II

General Information

Equipment Name: Probe Station II

Coral Name:

FIC: Shared

Process/Equipment Owner: Aamer Mahmood

Location: BRK 2261

Max Wafer Size: 4

1 2

System Information

General Description:

Probe Station II consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. There is a Kiethley 4200 Semiconductor Parameter Analyzer with an embedded PC to collect the data.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.