Probe Station II
Equipment Name: Probe Station II
Process/Equipment Owner: Aamer Mahmood
Location: BRK 2261
Max Wafer Size: 4
Probe Station II consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. There is a Kiethley 4200 Semiconductor Parameter Analyzer with an embedded PC to collect the data.
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.