Birck Nanotechnology Center

Probe Station I

General Information

Equipment Name: Probe Station I

Coral Name:

FIC: Shared

Process/Equipment Owner: Aamer Mahmood

Location: BRK 2261

Max Wafer Size: 4

1 2

System Information

General Description:

Probe Station I consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an HP4156 Semiconductor Parameter Analyzer, an HP 4274A low-frequency LCR Bridge, an HP 4275A high-frequency LCR Bridge, and an HP 4140B Picoammeter. A Windows-NT PC running Labview is used to drive the instruments and collect the data.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.