Probe Station I
Equipment Name: Probe Station I
Process/Equipment Owner: Aamer Mahmood
Location: BRK 2261
Max Wafer Size: 4
Probe Station I consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an HP4156 Semiconductor Parameter Analyzer, an HP 4274A low-frequency LCR Bridge, an HP 4275A high-frequency LCR Bridge, and an HP 4140B Picoammeter. A Windows-NT PC running Labview is used to drive the instruments and collect the data.
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.