JEOL/Nikon JCM-5000
General Information
Equipment Name: JEOL/Nikon JCM-5000 
Coral Name:
FIC: Shared
Process/Equipment Owner: Bill Rowe
Location: Cleanroom Bay P
System Information
General Description:
*Table Top SEM
*Magnification of up to 40,000x
*Resolution of 30-40nm
*Quick and easy to use for process monitoring
*Has high and low vacuum modes
*Three selectable voltages of 5, 10, 15kV
*Samples of up to 50mm thick and 70mm in diameter can be viewed
Capabilities:
*40,000X Magnification
*30-40nm Resolution
Useful System Links
Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.