Birck Nanotechnology Center

JEOL/Nikon JCM-5000

General Information

Equipment Name: JEOL/Nikon JCM-5000 Neoscope

Coral Name:

FIC: Shared

Process/Equipment Owner: Bill Rowe

Location: Cleanroom Bay P



System Information

General Description:

*Table Top SEM
*Magnification of up to 40,000x
*Resolution of 30-40nm
*Quick and easy to use for process monitoring
*Has high and low vacuum modes
*Three selectable voltages of 5, 10, 15kV
*Samples of up to 50mm thick and 70mm in diameter can be viewed



*40,000X Magnification
*30-40nm Resolution


Useful System Links

Equipment Use Fees
Reserve System
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.